This standard is applicable to electronic grade oxygen used in the production process of semiconductor discrete devices and integrated circuits. According to its usage requirements, electronic grade oxygen is divided into two levels, with the code of electronic grade I oxygen being DZO2- I; Grade II argon code: DZO2- II
SJ 2796-1987 Electronic Grade Oxygen
Chromatographic Column: GDX-104
Specification: 2m * 2mm
Particle size: 60-80 mesh
Application: Shimadzu GC14C, GC-2010, GC-2014, GC-2030, Agilent 6890789088608890; Thermo Fisher, Varian, Brooke
Separation: SJ 2796-1987 Determination of Trace Methane in Electronic Grade Oxygen - Hydrogen Flame Chromatography Method
Features: Good separation, symmetrical peak shape, no tail detachment
本标准适用于半导体分立器件和集成电路生产工艺过程中使用的电子级氧、按其使用要求电子级氧分为两级，代号为：电子 Ⅰ级氧代号为：DZO2-Ⅰ ; Ⅱ级氩代号为：DZO2- Ⅱ
SJ 2796-1987电子级氧
色谱柱：GDX-104
规格：2m*2mm
粒度：60-80目
应用：岛津GC14C，GC-2010，GC-2014，GC-2030,安捷伦6890,7890,8860,8890；赛默飞，瓦里安，布鲁克
分离：SJ 2796-1987电子级氧中痕量甲烷的测定方法 氢焰色谱法
特点：分离好，峰型对称，不脱尾
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