本标准规定了多晶硅用回收氢气中氯化氢,氮气,氧气,总碳含量的气相色谱测定方法.本标准适用于多晶硅用回收氢气的氯化氢,氮气,氧气,总碳含量的测定,测定范围为(0-10000)×10-6
测定氯化氢的方法有离子色谱法、分光光度法、红外光谱法和填充柱气相色谱法等,采用离子色谱法时需将氯化氢转化为Cl-进行检测,存在操作繁琐、耗气量大、耗时长等缺点。
浩瀚色谱研发HH-1毛细管柱测定多晶硅尾气中氯化氢，柱效高，分离好，结果满意。
名称：毛细管柱
固定液：二甲基聚硅氧烷
规格：30m*0.53mm*1.5um
型号：HH-1
应用：T/CNIA 0016-2019多晶硅用回收氢气中氯化氢,氮气,氧气,总碳含量的气相色谱测定
适用于：安捷伦6890 ，7890,7820,8860,8890，岛津GC-14C，GC-2010，GC-2018，GC-2030；赛默飞，瓦里安，布鲁克，PE，磐诺，福立，天瑞，天美，科创，川仪，华爱，东西电子，北分瑞利等
This standard specifies the gas chromatography method for determining the content of hydrogen chloride, nitrogen, oxygen, and total carbon in recycled hydrogen gas for polycrystalline silicon. This standard is applicable to the determination of hydrogen chloride, nitrogen, oxygen, and total carbon content in recycled hydrogen gas for polycrystalline silicon, with a measurement range of (0-10000) × 10-6
The methods for determining hydrogen chloride include ion chromatography, spectrophotometry, infrared spectroscopy, and packed column gas chromatography. When using ion chromatography, hydrogen chloride needs to be converted to Cl - for detection, which has the disadvantages of cumbersome operation, high gas consumption, and long time consumption.
Haohan Chromatography developed HH-1 capillary column for the determination of hydrogen chloride in polycrystalline silicon exhaust gas, with high column efficiency, good separation, and satisfactory results.
Name: Capillary Column
Fixed Liquid: Dimethyl Polysiloxane
Specification: 30m * 0.53mm * 1.5um
Model: HH-1
Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)
Applicable to: Agilent 68907890782088608890, Shimadzu GC-14C, GC-2010，GC-2018，GC-2030； Thermo Fisher, Varian, Brooke, PE, Panno, Fuli, Tianrui, Tianmei, Kechuang, Chuanyi, Huaai, Dongxi Electronics, Beifen Ruili, etc
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