多晶硅是太阳能光伏行业的基础材料，其主要生产工艺是改良西门子法(即三氯氢硅还原法，SiHCl3+H2 — Si+3HC1),该工艺使用的主要设备多晶硅还原炉就是钟罩式化学气相沉积炉。
浩瀚色谱（山东）应用技术开发有限公司，采用气相色谱法20%填充柱，多晶硅还原尾气中的氯化氢的检测，实现了多晶硅还原炉内尾气中的氯化氢含量的在线检测，对于还原炉排出的尾气中的氯化氢的含量检测准确，检测速度快，检测结果的反馈速度快。
名称：不锈钢填充柱
固定液：20%二甲基聚硅氧烷
担体：Chromosorb W AW DMCS80-100mesh
型号：OV-101
应用：T/CNIA 0016-2019多晶硅用回收氢气中氯化氢,氮气,氧气,总碳含量的气相色谱测定
适用于赛默飞1310系列；岛津GC-14C，GC-2010，GC-2014，GC-2030
Polycrystalline silicon is the basic material of the solar photovoltaic industry, and its main production process is the improved Siemens method (i.e. trichlorosilane reduction method, SiHCl3+H2 — Si+3HC1), The main equipment used in this process is the bell jar type chemical vapor deposition furnace for polycrystalline silicon reduction.
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. uses gas chromatography with a 20% packed column to detect hydrogen chloride in the tail gas of polycrystalline silicon reduction, achieving online detection of hydrogen chloride content in the tail gas of polycrystalline silicon reduction furnace. The detection of hydrogen chloride content in the tail gas discharged from the reduction furnace is accurate, fast, and the feedback speed of the detection results is fast.
Name: Stainless Steel Filled Column
Fixed liquid: 20% dimethyl polysiloxane
Carrier: Chromosorb W AW DMCS80-100 mesh
Model: OV-101
Application: Gas Chromatography Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon Content in Recycled Hydrogen for Polycrystalline Silicon (T/CNIA 0016-2019)
Applicable to the Thermo Fisher 1310 series; Shimadzu GC-14C, GC-2010，GC-2014，GC-2030
滕州市浩瀚色谱仪器技术服务有限公司
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